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Page 1
Comprehensive Simulations for Ultraviolet Lithography Process of Thick SU-8 Photoresist.
Micromachines (Basel). 2018 Jul 5;9(7):341. doi: 10.3390/mi9070341.
Micromachines (Basel). 2018.
PMID: 30424274
Free PMC article.
Review.
Three-Dimensional Simulation of DRIE Process Based on the Narrow Band Level Set and Monte Carlo Method.
Yu JC, Zhou ZF, Su JL, Xia CF, Zhang XW, Wu ZZ, Huang QA.
Yu JC, et al. Among authors: zhou zf.
Micromachines (Basel). 2018 Feb 9;9(2):74. doi: 10.3390/mi9020074.
Micromachines (Basel). 2018.
PMID: 30393350
Free PMC article.
Item in Clipboard
A Simple Extraction Method of Young's Modulus for Multilayer Films in MEMS Applications.
Guo XG, Zhou ZF, Sun C, Li WH, Huang QA.
Guo XG, et al. Among authors: zhou zf.
Micromachines (Basel). 2017 Jun 23;8(7):201. doi: 10.3390/mi8070201.
Micromachines (Basel). 2017.
PMID: 30400391
Free PMC article.
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A Generalized Polynomial Chaos-Based Approach to Analyze the Impacts of Process Deviations on MEMS Beams.
Gao L, Zhou ZF, Huang QA.
Gao L, et al. Among authors: zhou zf.
Sensors (Basel). 2017 Nov 8;17(11):2561. doi: 10.3390/s17112561.
Sensors (Basel). 2017.
PMID: 29117096
Free PMC article.
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A 2D Waveguide Method for Lithography Simulation of Thick SU-8 Photoresist.
Geng ZC, Zhou ZF, Dai H, Huang QA.
Geng ZC, et al. Among authors: zhou zf.
Micromachines (Basel). 2020 Oct 29;11(11):972. doi: 10.3390/mi11110972.
Micromachines (Basel). 2020.
PMID: 33138304
Free PMC article.
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A Novel Measurement Method of Mechanical Properties for Individual Layers in Multilayered Thin Films.
Zhou ZF, Meng MZ, Sun C, Huang QA.
Zhou ZF, et al.
Micromachines (Basel). 2019 Oct 2;10(10):669. doi: 10.3390/mi10100669.
Micromachines (Basel). 2019.
PMID: 31581644
Free PMC article.
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In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films.
Gu YF, Zhou ZF, Sun C, Li WH, Huang QA.
Gu YF, et al. Among authors: zhou zf.
Micromachines (Basel). 2016 Oct 1;7(10):174. doi: 10.3390/mi7100174.
Micromachines (Basel). 2016.
PMID: 30404348
Free PMC article.
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