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Mechanical Properties and Oxidation Behavior of TaWSiN Films.
Materials (Basel). 2022 Nov 17;15(22):8179. doi: 10.3390/ma15228179.
Materials (Basel). 2022.
PMID: 36431666
Free PMC article.
Effect of Bias Voltage on Mechanical Properties of HiPIMS/RFMS Cosputtered Zr-Si-N Films.
Chen YI, Zheng YZ, Chang LC, Liu YH.
Chen YI, et al.
Materials (Basel). 2019 Aug 21;12(17):2658. doi: 10.3390/ma12172658.
Materials (Basel). 2019.
PMID: 31438512
Free PMC article.
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