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Structural, optical, and mechanical properties of TiO2 nanolaminates.
Ghazaryan L, Handa S, Schmitt P, Beladiya V, Roddatis V, Tünnermann A, Szeghalmi A. Ghazaryan L, et al. Among authors: beladiya v. Nanotechnology. 2021 Feb 26;32(9):095709. doi: 10.1088/1361-6528/abcbc1. Nanotechnology. 2021. PMID: 33207326
Plasma-Enhanced Atomic Layer Deposition of HfO2 with Substrate Biasing: Thin Films for High-Reflective Mirrors.
Beladiya V, Faraz T, Schmitt P, Munser AS, Schröder S, Riese S, Mühlig C, Schachtler D, Steger F, Botha R, Otto F, Fritz T, van Helvoirt C, Kessels WMM, Gargouri H, Szeghalmi A. Beladiya V, et al. ACS Appl Mater Interfaces. 2022 Mar 30;14(12):14677-14692. doi: 10.1021/acsami.1c21889. Epub 2022 Mar 21. ACS Appl Mater Interfaces. 2022. PMID: 35311275
Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies.
Faraz T, Knoops HCM, Verheijen MA, van Helvoirt CAA, Karwal S, Sharma A, Beladiya V, Szeghalmi A, Hausmann DM, Henri J, Creatore M, Kessels WMM. Faraz T, et al. Among authors: beladiya v. ACS Appl Mater Interfaces. 2018 Apr 18;10(15):13158-13180. doi: 10.1021/acsami.8b00183. Epub 2018 Apr 9. ACS Appl Mater Interfaces. 2018. PMID: 29554799 Free PMC article.