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Comparison of the Material Quality of AlxIn1-xN (x-0-0.50) Films Deposited on Si(100) and Si(111) at Low Temperature by Reactive RF Sputtering.
Materials (Basel). 2022 Oct 21;15(20):7373. doi: 10.3390/ma15207373.
Materials (Basel). 2022.
PMID: 36295439
Free PMC article.
AlxIn1-xN on Si (100) Solar Cells (x = 0-0.56) Deposited by RF Sputtering.
Valdueza-Felip S, Blasco R, Olea J, Díaz-Lobo A, Braña AF, Naranjo FB.
Valdueza-Felip S, et al.
Materials (Basel). 2020 May 19;13(10):2336. doi: 10.3390/ma13102336.
Materials (Basel). 2020.
PMID: 32438685
Free PMC article.
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