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Bottom-Up Generated Height Gauges for Silicon-Based Nanometrology.
Sheglov DV, Rogilo DI, Fedina LI, Sitnikov SV, Sysoev EV, Latyshev AV. Sheglov DV, et al. Among authors: sitnikov sv. ACS Appl Mater Interfaces. 2023 Mar 8;15(9):12511-12523. doi: 10.1021/acsami.2c20154. Epub 2023 Feb 21. ACS Appl Mater Interfaces. 2023. PMID: 36808946
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