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seong ju won
(3 results)?
Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane.
Membranes (Basel). 2022 Dec 21;13(1):5. doi: 10.3390/membranes13010005.
Membranes (Basel). 2022.
PMID: 36676812
Free PMC article.
Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography.
Wi SJ, Jang YJ, Kim H, Cho K, Ahn J.
Wi SJ, et al.
Membranes (Basel). 2022 Mar 26;12(4):367. doi: 10.3390/membranes12040367.
Membranes (Basel). 2022.
PMID: 35448337
Free PMC article.
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Extreme ultraviolet pellicle wrinkles influence on mask 3D effects: experimental demonstration.
Lee DG, Moon S, Choi J, Wi SJ, Ahn J.
Lee DG, et al. Among authors: wi sj.
Appl Opt. 2023 Aug 20;62(24):6307-6315. doi: 10.1364/AO.495649.
Appl Opt. 2023.
PMID: 37706820
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Study on ZrSi2 as a Candidate Material for Extreme Ultraviolet Pellicles.
Wi SJ, Kim WJ, Kim H, Jeong D, Lee DG, Choi J, Cho SJ, Yu L, Ahn J.
Wi SJ, et al.
Membranes (Basel). 2023 Aug 14;13(8):731. doi: 10.3390/membranes13080731.
Membranes (Basel). 2023.
PMID: 37623792
Free PMC article.
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