Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.
Keywords: birefringence; full-field optical measurements; generic integration; group index; group velocity dispersion; multi-project wafer; photonic integrated circuits; propagation loss; silicon nitride photonics; silicon photonics.