Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

Sensors (Basel). 2017 Sep 12;17(9):2088. doi: 10.3390/s17092088.

Abstract

Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.

Keywords: birefringence; full-field optical measurements; generic integration; group index; group velocity dispersion; multi-project wafer; photonic integrated circuits; propagation loss; silicon nitride photonics; silicon photonics.