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Page 1
Uncertainty Quantification of Microstructure-Governed Properties of Polysilicon MEMS.
Micromachines (Basel). 2017 Aug 12;8(8):248. doi: 10.3390/mi8080248.
Micromachines (Basel). 2017.
PMID: 30400439
Free PMC article.
Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators.
Mirzazadeh R, Mariani S.
Mirzazadeh R, et al.
Micromachines (Basel). 2019 Apr 19;10(4):263. doi: 10.3390/mi10040263.
Micromachines (Basel). 2019.
PMID: 31010138
Free PMC article.
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Mechanical Characterization of Polysilicon MEMS: A Hybrid TMCMC/POD-Kriging Approach.
Mirzazadeh R, Eftekhar Azam S, Mariani S.
Mirzazadeh R, et al.
Sensors (Basel). 2018 Apr 17;18(4):1243. doi: 10.3390/s18041243.
Sensors (Basel). 2018.
PMID: 29673228
Free PMC article.
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Statistical Investigation of the Mechanical and Geometrical Properties of Polysilicon Films through On-Chip Tests.
Mirzazadeh R, Ghisi A, Mariani S.
Mirzazadeh R, et al.
Micromachines (Basel). 2018 Jan 30;9(2):53. doi: 10.3390/mi9020053.
Micromachines (Basel). 2018.
PMID: 30393329
Free PMC article.
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Micromechanical Characterization of Polysilicon Films through On-Chip Tests.
Mirzazadeh R, Eftekhar Azam S, Mariani S.
Mirzazadeh R, et al.
Sensors (Basel). 2016 Jul 28;16(8):1191. doi: 10.3390/s16081191.
Sensors (Basel). 2016.
PMID: 27483268
Free PMC article.
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