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Page 1
Optimization of Metal-Assisted Chemical Etching for Deep Silicon Nanostructures.
Nanomaterials (Basel). 2021 Oct 22;11(11):2806. doi: 10.3390/nano11112806.
Nanomaterials (Basel). 2021.
PMID: 34835572
Free PMC article.
Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates.
Akan R, Frisk T, Lundberg F, Ohlin H, Johansson U, Li K, Sakdinawat A, Vogt U.
Akan R, et al.
Micromachines (Basel). 2020 Mar 13;11(3):301. doi: 10.3390/mi11030301.
Micromachines (Basel). 2020.
PMID: 32183040
Free PMC article.
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Reaction control of metal-assisted chemical etching for silicon-based zone plate nanostructures.
Akan R, Parfeniukas K, Vogt C, Toprak MS, Vogt U.
Akan R, et al.
RSC Adv. 2018 Apr 3;8(23):12628-12634. doi: 10.1039/c8ra01627e. eCollection 2018 Apr 3.
RSC Adv. 2018.
PMID: 35541233
Free PMC article.
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