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Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD.
Veltkamp HW, Janssens YL, de Boer MJ, Zhao Y, Wiegerink RJ, Tas NR, Lötters JC. Veltkamp HW, et al. Among authors: de boer mj. Micromachines (Basel). 2022 Nov 4;13(11):1908. doi: 10.3390/mi13111908. Micromachines (Basel). 2022. PMID: 36363929 Free PMC article.
Micromechanically tuned ring resonator in silicon on insulator.
Kauppinen LJ, Abdulla SM, Dijkstra M, de Boer MJ, Berenschot E, Krijnen GJ, Pollnau M, de Ridder RM. Kauppinen LJ, et al. Among authors: de boer mj. Opt Lett. 2011 Apr 1;36(7):1047-9. doi: 10.1364/OL.36.001047. Opt Lett. 2011. PMID: 21478978
Nanoimprint lithography for nanophotonics in silicon.
Bruinink CM, Burresi M, de Boer MJ, Segerink FB, Jansen HV, Berenschot E, Reinhoudt DN, Huskens J, Kuipers L. Bruinink CM, et al. Among authors: de boer mj. Nano Lett. 2008 Sep;8(9):2872-7. doi: 10.1021/nl801615c. Epub 2008 Aug 12. Nano Lett. 2008. PMID: 18698727