Ultrathin fullerene films as high-resolution molecular resists for low-voltage electron-beam lithography

Small. 2006 Aug;2(8-9):1003-6. doi: 10.1002/smll.200500443.
No abstract available

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Electronics*
  • Fullerenes*

Substances

  • Fullerenes