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Developing a MEMS Device with Built-in Microfluidics for Biophysical Single Cell Characterization.
Micromachines (Basel). 2018 Jun 1;9(6):275. doi: 10.3390/mi9060275.
Micromachines (Basel). 2018.
PMID: 30424208
Free PMC article.
An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications.
Sano C, Ataka M, Hashiguchi G, Toshiyoshi H.
Sano C, et al. Among authors: ataka m.
Micromachines (Basel). 2020 Mar 4;11(3):267. doi: 10.3390/mi11030267.
Micromachines (Basel). 2020.
PMID: 32143465
Free PMC article.
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