Building a Fab on a Chip.
Imboden M, Han H, Stark T, Lowell E, Chang J, Pardo F, Bolle C, del Corro PG, Bishop DJ.
Imboden M, et al.
Nanoscale. 2014 May 21;6(10):5049-62. doi: 10.1039/c3nr06087j.
Nanoscale. 2014.
PMID: 24705908
We demonstrate a path forward where, for certain applications, especially at the nanometer scale, one can consider using a single chip approach for building devices with significant potential cost savings. In our approach, we build micro versions of the macro machines one …
We demonstrate a path forward where, for certain applications, especially at the nanometer scale, one can consider using a single chip appro …