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Self-Controlled Cleaving Method for Silicon DRIE Process Cross-Section Characterization.
Micromachines (Basel). 2021 May 8;12(5):534. doi: 10.3390/mi12050534.
Micromachines (Basel). 2021.
PMID: 34066851
Free PMC article.
Low-loss silicon nitride photonic ICs for near-infrared wavelength bandwidth.
Buzaverov KA, Baburin AS, Sergeev EV, Avdeev SS, Lotkov ES, Andronik M, Stukalova VE, Baklykov DA, Dyakonov IV, Skryabin NN, Saygin MY, Kulik SP, Ryzhikov IA, Rodionov IA.
Buzaverov KA, et al.
Opt Express. 2023 May 8;31(10):16227-16242. doi: 10.1364/OE.477458.
Opt Express. 2023.
PMID: 37157706
Free article.
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