Hyo Chang Lee - Search Results

Year	Number of Results
2010	1
2013	2
2015	3
2021	2
2022	1
2023	1
2024	2

1

Role of Oxygen in Amorphous Carbon Hard Mask Plasma Etching.

Yeom HJ, Yoon MY, Choi D, Lee Y, Kim JH, You SJ, Lee HC. Yeom HJ, et al. Among authors: lee hc. ACS Omega. 2023 Aug 31;8(36):32450-32457. doi: 10.1021/acsomega.3c02438. eCollection 2023 Sep 12. ACS Omega. 2023. PMID: 37720774 Free PMC article.

2

Correlation with the Microstructure and Synergistic Physiochemical Etching Resistance of Nanocomposites under Fluorine-Containing Plasma Conditions.

Ma HJ, Hong S, Oh HM, Kumar K, Kim MJ, Kim HN, Ko JW, Lee JW, Lee HC, Park YJ. Ma HJ, et al. Among authors: lee hc. ACS Appl Mater Interfaces. 2022 Sep 28;14(38):43771-43782. doi: 10.1021/acsami.2c12311. Epub 2022 Sep 13. ACS Appl Mater Interfaces. 2022. PMID: 36099583

3

Low-Temperature, Universal Synthetic Route for Mesoporous Metal Oxides by Exploiting Synergistic Effect of Thermal Activation and Plasma.

Kim KW, Seok H, Son S, Park SJ, Yang C, Lee D, Lee HC, Mun J, Yeom HJ, Yoon MY, Park B, Kim SH, Jo C, Moon HC, Kim T, Kim JK. Kim KW, et al. Among authors: lee hc. Adv Mater. 2024 Jan 19:e2311809. doi: 10.1002/adma.202311809. Online ahead of print. Adv Mater. 2024. PMID: 38241612

4

Two-dimensional-spatial distribution measurement of electron temperature and plasma density in low temperature plasmas.

Kim YC, Jang SH, Oh SJ, Lee HC, Chung CW. Kim YC, et al. Among authors: lee hc. Rev Sci Instrum. 2013 May;84(5):053505. doi: 10.1063/1.4802673. Rev Sci Instrum. 2013. PMID: 23742549

5

Mechanism of solid-state plasma-induced dewetting for formation of copper and gold nanoparticles.

Kwon SH, Choe HJ, Lee HC, Chung CW, Lee JJ. Kwon SH, et al. Among authors: lee hc. J Nanosci Nanotechnol. 2013 Sep;13(9):6109-14. doi: 10.1166/jnn.2013.7682. J Nanosci Nanotechnol. 2013. PMID: 24205610

6

Exploring the nonextensive thermodynamics of partially ionized gas in magnetic field.

Kim JY, Lee HC, Go G, Choi YH, Hwang YS, Chung KJ. Kim JY, et al. Among authors: lee hc. Phys Rev E. 2021 Oct;104(4-2):045202. doi: 10.1103/PhysRevE.104.045202. Phys Rev E. 2021. PMID: 34781524

7

Crystalline silicon nanoparticle formation by tailored plasma irradiation: self-structurization, nucleation and growth acceleration, and size control.

Choi D, Kim JH, Kwon DC, Shin CH, Ryu H, Yoon E, Lee HC. Choi D, et al. Among authors: lee hc. Nanoscale. 2021 Jun 17;13(23):10356-10364. doi: 10.1039/d1nr00628b. Nanoscale. 2021. PMID: 34105564

8

Microstructural characterization and inductively coupled plasma-reactive ion etching resistance of Y₂O₃-Y₄Al₂O₉ composite under CF₄/Ar/O₂ mixed gas conditions.

Ma HJ, Kim S, Kim HN, Kim MJ, Ko JW, Lee JW, Kim JH, Lee HC, Park YJ. Ma HJ, et al. Among authors: lee hc. Sci Rep. 2024 Mar 25;14(1):7008. doi: 10.1038/s41598-024-57697-5. Sci Rep. 2024. PMID: 38523148 Free PMC article.

9

Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas.

Lee MH, Lee HC, Chung CW. Lee MH, et al. Among authors: lee hc. Phys Rev E Stat Nonlin Soft Matter Phys. 2010 Apr;81(4 Pt 2):046402. doi: 10.1103/PhysRevE.81.046402. Epub 2010 Apr 20. Phys Rev E Stat Nonlin Soft Matter Phys. 2010. PMID: 20481842

10

Control of Size Uniformity of Cu Nanoparticle Array Produced by Plasma-Induced Dewetting.

Kwon SH, Choe HJ, Lee HC, Chung CW, Lee JJ. Kwon SH, et al. Among authors: lee hc. J Nanosci Nanotechnol. 2015 Mar;15(3):2542-6. doi: 10.1166/jnn.2015.10237. J Nanosci Nanotechnol. 2015. PMID: 26413702

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