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SAW Resonators and Filters Based on Sc0.43Al0.57N on Single Crystal and Polycrystalline Diamond.
Micromachines (Basel). 2022 Jun 30;13(7):1061. doi: 10.3390/mi13071061.
Micromachines (Basel). 2022.
PMID: 35888879
Free PMC article.
SAW COM-parameter extraction in AlN/diamond layered structures.
Iriarte GF, Engelmark F, Katardjiev IV, Plessky V, Yantchev V.
Iriarte GF, et al.
IEEE Trans Ultrason Ferroelectr Freq Control. 2003 Nov;50(11):1542-7. doi: 10.1109/tuffc.2003.1251137.
IEEE Trans Ultrason Ferroelectr Freq Control. 2003.
PMID: 14682637
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Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni.
Iriarte GF, Bjurström J, Westlinder J, Engelmark F, Katardjiev IV.
Iriarte GF, et al.
IEEE Trans Ultrason Ferroelectr Freq Control. 2005 Jul;52(7):1170-4. doi: 10.1109/tuffc.2005.1504003.
IEEE Trans Ultrason Ferroelectr Freq Control. 2005.
PMID: 16212256
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