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Page 1
Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator Monolithically Integrated with CMOS Readout Circuitry.
Micromachines (Basel). 2016 Mar 2;7(3):40. doi: 10.3390/mi7030040.
Micromachines (Basel). 2016.
PMID: 30407413
Free PMC article.
Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction.
Marigó E, Sansa M, Pérez-Murano F, Uranga A, Barniol N.
Marigó E, et al.
Sensors (Basel). 2015 Jul 14;15(7):17036-47. doi: 10.3390/s150717036.
Sensors (Basel). 2015.
PMID: 26184222
Free PMC article.
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