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Page 1
Comparison of CoW/SiO2 and CoB/SiO2 Interconnects from the Perspective of Electrical and Reliability Characteristics.
Materials (Basel). 2023 Feb 9;16(4):1452. doi: 10.3390/ma16041452.
Materials (Basel). 2023.
PMID: 36837082
Free PMC article.
Electrical Characteristics and Reliability of Nitrogen-Stuffed Porous Low-k SiOCH/Mn2O3-xN/Cu Integration.
Cheng YL, Lin YL, Lee CY, Chen GS, Fang JS.
Cheng YL, et al. Among authors: lee cy.
Molecules. 2019 Oct 28;24(21):3882. doi: 10.3390/molecules24213882.
Molecules. 2019.
PMID: 31661909
Free PMC article.
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