Using an SU-8 photoresist structure and cytochrome C thin film sensing material for a microbolometer

Sensors (Basel). 2012 Nov 27;12(12):16390-403. doi: 10.3390/s121216390.

Abstract

There are two critical parameters for microbolometers: the temperature coefficient of resistance (TCR) of the sensing material, and the thermal conductance of the insulation structure. Cytochrome c protein, having a high TCR, is a good candidate for infrared detection. We can use SU-8 photoresist for the thermal insulation structure, given its low thermal conductance. In this study, we designed a platform structure based on a SU-8 photoresist. We fabricated an infrared sensing pixel and recorded a high TCR for this new structure. The SU-8 photoresist insulation structure was fabricated using the exposure dose method. We experimentally demonstrated high values of TCR from 22%/K to 25.7%/K, and the measured noise was 1.2 × 10(-8) V2/Hz at 60 Hz. When the bias current was 2 μA, the calculated voltage responsivity was 1.16 × 10(5) V/W. This study presents a new kind of microbolometer based on cytochrome c protein on top of an SU-8 photoresist platform that does not require expensive vacuum deposition equipment.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Cytochromes c / chemistry*
  • Epoxy Compounds / chemistry*
  • Infrared Rays
  • Polymers / chemistry*
  • Surface Properties*

Substances

  • Epoxy Compounds
  • Polymers
  • SU-8 compound
  • Cytochromes c