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Defect Inspection Techniques in SiC.
Chen PC, Miao WC, Ahmed T, Pan YY, Lin CL, Chen SC, Kuo HC, Tsui BY, Lien DH. Chen PC, et al. Among authors: tsui by. Nanoscale Res Lett. 2022 Mar 4;17(1):30. doi: 10.1186/s11671-022-03672-w. Nanoscale Res Lett. 2022. PMID: 35244784 Free PMC article. Review.