Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level

Yassir Arezki; Rong Su; Ville Heikkinen; François Leprete; Pavel Posta; Youichi Bitou; Christian Schober; Charyar Mehdi-Souzani; Bandar Abdulrahman Mohammed Alzahrani; Xiangchao Zhang; Yohan Kondo; Christof Pruss; Vit Ledl; Nabil Anwer; Mohamed Lamjed Bouazizi; Richard Leach; Hichem Nouira

doi:10.3390/s21041103

Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level

Sensors (Basel). 2021 Feb 5;21(4):1103. doi: 10.3390/s21041103.

Authors

Yassir Arezki^{1

2}, Rong Su³, Ville Heikkinen⁴, François Leprete⁵, Pavel Posta⁶, Youichi Bitou⁷, Christian Schober⁸, Charyar Mehdi-Souzani², Bandar Abdulrahman Mohammed Alzahrani⁹, Xiangchao Zhang¹⁰, Yohan Kondo⁷, Christof Pruss⁸, Vit Ledl⁶, Nabil Anwer², Mohamed Lamjed Bouazizi⁹, Richard Leach³, Hichem Nouira¹

Affiliations

¹ Laboratoire Commun de Métrologie (LCM), Laboratoire National de Métrologie et d'Essais (LNE), 1 Rue Gaston Boissier, 75015 Paris, France.
² Université Paris-Saclay, Université Sorbonne Paris Nord, ENS Paris-Saclay, LURPA, 91190 Gif-sur-Yvette, France.
³ Manufacturing Metrology Team, Faculty of Engineering, University of Nottingham (UNOTT), Nottingham NG8 1BB, UK.
⁴ VTT Technical Research Centre of Finland Ltd., Centre for Metrology MIKES, Tekniikantie 1, 02150 Espoo, Finland.
⁵ THALES LAS France, Etablissement de Saint Heand, Boulevard Ravel de Malval, 42570 Saint Heand, France.
⁶ TOPTEC, Institute of Plasma Physics of the Czech Academy of Sciences, Za Slovankou 1782/3, 182 00 Praha, Czech Republic.
⁷ National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), Tsukuba, Ibaraki 305-8563, Japan.
⁸ Institute of Applied Optics (ITO), University Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany.
⁹ Department of Mechanical Engineering, College of Engineering, Prince Sattam bin Abdulaziz University (PSAU), Alkharj 16273, Saudi Arabia.
¹⁰ Shanghai Engineering Centre of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, China.

Abstract

The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.

Keywords: aspheric and freeform optical elements; dimensional metrology; measured data evaluation; robust reference minimum zone (Hybrid Trust Region) fitting; ultra-high precision measuring machine; uncertainty.