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2018 | 1 |
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Analysis of Frequency Stability and Thermoelastic Effects for Slotted Tuning Fork MEMS Resonators.
Sensors (Basel). 2018 Jul 4;18(7):2157. doi: 10.3390/s18072157.
Sensors (Basel). 2018.
PMID: 29973566
Free PMC article.
Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness.
Frangi A, Guerrieri A, Boni N.
Frangi A, et al.
Sensors (Basel). 2017 Apr 6;17(4):779. doi: 10.3390/s17040779.
Sensors (Basel). 2017.
PMID: 28383483
Free PMC article.
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