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Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection.
Malsagova KA, Pleshakova TO, Kozlov AF, Shumov ID, Ilnitskii MA, Miakonkikh AV, Popov VP, Rudenko KV, Glukhov AV, Kupriyanov IN, Ivanova ND, Rogozhin AE, Archakov AI, Ivanov YD. Malsagova KA, et al. Among authors: rogozhin ae. Biosensors (Basel). 2018 Jul 27;8(3):72. doi: 10.3390/bios8030072. Biosensors (Basel). 2018. PMID: 30060476 Free PMC article.