Effect of thermal annealing in vacuum and in air on nanograin sizes in hard and superhard coatings Zr-Ti-Si-N.
Pogrebnjak AD, Shpak AP, Beresnev VM, Kolesnikov DA, Kunitskii YA, Sobol OV, Uglov VV, Komarov FF, Shypylenko AP, Makhmudov NA, Demyanenko AA, Baidak VS, Grudnitskii VV.
Pogrebnjak AD, et al.
J Nanosci Nanotechnol. 2012 Dec;12(12):9213-9. doi: 10.1166/jnn.2012.6777.
J Nanosci Nanotechnol. 2012.
PMID: 23447980
When Ti and Si concentration increased and three phases nc-ZrN, (Zr, Ti)N-nc, and alpha-Si3N4 were formed, average hardness increased to 40.8 +/- 4 GPa. Annealing to 500 degrees C increased hardness and demonstrated lower spread in values H = 48 +/- 6 GPa and E = (456 +/- …
When Ti and Si concentration increased and three phases nc-ZrN, (Zr, Ti)N-nc, and alpha-Si3N4 were formed, average hardness increased …