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Bulk micro-defect detection with low-angle illumination.
Szarvas T, Molnár G, Nádudvari G, Tóth S, Almásy O, Spindler S, Erdei D, Pothorszky S, Kretschmer R, Bauer S. Szarvas T, et al. Among authors: spindler s. Rev Sci Instrum. 2021 Apr 1;92(4):043701. doi: 10.1063/5.0027147. Rev Sci Instrum. 2021. PMID: 34243430
Application of light scattering tomography for Si(111) samples.
Szarvas T, Pothorszky S, Erdei D, Molnár G, Nádudvari G, Almásy O, Spindler S, Kretschmer R, Bauer S. Szarvas T, et al. Among authors: spindler s. Rev Sci Instrum. 2021 May 1;92(5):053701. doi: 10.1063/5.0036868. Rev Sci Instrum. 2021. PMID: 34243353
124 results