Thermal annealing study of the mid-infrared aluminum nitride on insulator (AlNOI) photonics platform.
Dong B, Luo X, Zhu S, Hu T, Li M, Hasan D, Zhang L, Chua SJ, Wei J, Chang Y, Ma Y, Vachon P, Lo GQ, Ang KW, Kwong DL, Lee C.
Dong B, et al. Among authors: zhang l.
Opt Express. 2019 Jul 8;27(14):19815-19826. doi: 10.1364/OE.27.019815.
Opt Express. 2019.
PMID: 31503736
Free article.