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EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer.
RSC Adv. 2018 Mar 19;8(20):10930-10938. doi: 10.1039/c7ra12934c. eCollection 2018 Mar 16.
RSC Adv. 2018.
PMID: 35541508
Free PMC article.
Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer.
Moura CADS, Belmonte GK, Reddy PG, Gonsalves KE, Weibel DE.
Moura CADS, et al.
RSC Adv. 2018 Apr 20;8(27):15029. doi: 10.1039/c8ra90030b. eCollection 2018 Apr 18.
RSC Adv. 2018.
PMID: 35544017
Free PMC article.
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