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Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.
Sensors (Basel). 2019 Mar 22;19(6):1410. doi: 10.3390/s19061410.
Sensors (Basel). 2019.
PMID: 30909410
Free PMC article.
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