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Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.
Sensors (Basel). 2019 Mar 22;19(6):1410. doi: 10.3390/s19061410.
Sensors (Basel). 2019.
PMID: 30909410
Free PMC article.
Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements.
Xu M, Zhou Z, Ahbe T, Peiner E, Brand U.
Xu M, et al. Among authors: ahbe t.
Sensors (Basel). 2022 Feb 8;22(3):1298. doi: 10.3390/s22031298.
Sensors (Basel). 2022.
PMID: 35162043
Free PMC article.
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True 3D Nanometrology: 3D-Probing with a Cantilever-Based Sensor.
Thiesler J, Ahbe T, Tutsch R, Dai G.
Thiesler J, et al. Among authors: ahbe t.
Sensors (Basel). 2021 Dec 31;22(1):314. doi: 10.3390/s22010314.
Sensors (Basel). 2021.
PMID: 35009855
Free PMC article.
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