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Fabrication of high aspect ratio tungsten nanostructures on ultrathin c-Si membranes for extreme UV applications.
Nanotechnology. 2016 Jan 15;27(2):025304. doi: 10.1088/0957-4484/27/2/025304. Epub 2015 Dec 2.
Nanotechnology. 2016.
PMID: 26630379
Fabrication of buckling free ultrathin silicon membranes by direct bonding with thermal difference.
Delachat F, Constancias C, Fournel F, Morales C, Le Drogoff B, Chaker M, Margot J.
Delachat F, et al. Among authors: constancias c.
ACS Nano. 2015;9(4):3654-63. doi: 10.1021/acsnano.5b00234. Epub 2015 Mar 25.
ACS Nano. 2015.
PMID: 25789462
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Probing multilayer stack reflectors by low coherence interferometry in extreme ultraviolet.
de Rossi S, Joyeux D, Chavel P, de Oliveira N, Richard M, Constancias C, Robic JY.
de Rossi S, et al. Among authors: constancias c.
Appl Opt. 2008 Apr 20;47(12):2109-15. doi: 10.1364/ao.47.002109.
Appl Opt. 2008.
PMID: 18425186
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