A spherically-shaped PZT thin film ultrasonic transducer with an acoustic impedance gradient matching layer based on a micromachined periodically structured flexible substrate

Sensors (Basel). 2013 Oct 9;13(10):13543-59. doi: 10.3390/s131013543.

Abstract

This paper presents the microfabrication of an acoustic impedance gradient matching layer on a spherically-shaped piezoelectric ultrasonic transducer. The acoustic matching layer can be designed to achieve higher acoustic energy transmission and operating bandwidth. Also included in this paper are a theoretical analysis of the device design and a micromachining technique to produce the novel transducer. Based on a design of a lead titanium zirconium (PZT) micropillar array, the constructed gradient acoustic matching layer has much better acoustic transmission efficiency within a 20-50 MHz operation range compared to a matching layer with a conventional quarter-wavelength thickness Parylene deposition. To construct the transducer, periodic microcavities are built on a flexible copper sheet, and then the sheet forms a designed curvature with a ball shaping. After PZT slurry deposition, the constructed PZT micropillar array is released onto a curved thin PZT layer. Following Parylene conformal coating on the processed PZT micropillars, the PZT micropillars and the surrounding Parylene comprise a matching layer with gradient acoustic impedance. By using the proposed technique, the fabricated transducer achieves a center frequency of 26 MHz and a -6 dB bandwidth of approximately 65%.

Publication types

  • Research Support, Non-U.S. Gov't

MeSH terms

  • Elastic Modulus
  • Electric Impedance
  • Equipment Design
  • Equipment Failure Analysis
  • Image Enhancement / instrumentation*
  • Membranes, Artificial*
  • Miniaturization
  • Reproducibility of Results
  • Sensitivity and Specificity
  • Transducers*
  • Ultrasonography / instrumentation*

Substances

  • Membranes, Artificial