Effect of Adding Al on the Phase Structure and Gettering Performance of TiZrV Non-Evaporable Getter Materials

Lulu Wang; Yang Li; Deyu Guo; Qingxi Jin; Zhenbin Zhang; Zhimin Yang

doi:10.3390/ma17091969

Effect of Adding Al on the Phase Structure and Gettering Performance of TiZrV Non-Evaporable Getter Materials

Materials (Basel). 2024 Apr 24;17(9):1969. doi: 10.3390/ma17091969.

Authors

Lulu Wang^{1

2

3}, Yang Li^{1

2}, Deyu Guo^{1

2}, Qingxi Jin^{1

2

3}, Zhenbin Zhang^{1

2

3}, Zhimin Yang^{1

2

3}

Affiliations

¹ State Key Laboratory for Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China.
² GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China.
³ General Research Institute for Nonferrous Metals, Beijing 100088, China.

Abstract

Titanium zirconium vanadium (TiZrV) is a widely used non-evaporable getter (NEG) material with the characteristics of a low activation temperature and a large gas absorption capacity. At present, the research on TiZrV getters mainly focuses on the thin-film state, with little research on the bulk state. In this paper, a TiZrV getter was optimized by adding Al, and the phase structure, activation properties, and gettering performance were studied. With the addition of Al, the α-Zr phase and Ti₂Zr phase changed into the Ti-Zr phase and Al-Zr, Al-Ti phase. The newly generated phase promoted the diffusion of hydrogen and oxygen atoms. The activation temperature decreased significantly, as shown in the in situ XPS results. The H₂ and CO gettering performance of TiZrVAl samples was promoted to 2073 cm³·s^-1 and 1912.8 cm³·s^-1, increased by 40.7% and 40.3%. This paper provides valuable ideas for optimizing the properties of bulk TiZrV getters.

Keywords: NEG; TiZrV; in situ XPS; phase.

Grants and funding

Z231100005523002/Beijing Municipal Science& Technology Commission, Administrative Commission of Zhongguancun Science Park