This paper explores the latest developments in physical vapor deposition (PVD) techniques for fabricating silicon-carbon (Si/C) based thin films as anodes of Lithium-Ion batteries (LiBs). Properties of Si/C based materials, such as high thermal stability, electrical conductivity and mechanical strength, have addressed the critical challenges associated with the use silicon as anode material for LiBs, including as volume expansion during lithiation, structural stability and electrode degradation. The review article aims to provide recent advances in the use of Si/C-based thin film materials deposited via PVD processes as anodes for LiBs. PVD deposition processes provide numerous benefits including the precise control over the structure, thickness, morphology, as well as the design of deposited thin-film materials, and this article provides an in-depth analysis on the design and synthesis of Si/C thin films, as well as its electrochemical performance and stability when used as anode for LiBs. The primary aim of this paper is to underscore the advantages provided by PVD processes in overcoming challenges associated with using pure silicon as anode material for LiBs, or in improving the electrochemical performance of Si/C-based anode materials through the design of several Si/C films, covering both multilayer and nanocomposite Si/C film configurations outlined in sections 2 and 3, respectively. Insights into the mechanisms governing lithium-ion insertion/extraction processes within the Si/C matrix are provided, offering an understanding of the material's behavior during battery cycling.
Keywords: Batteries; Li-ion; Physical Vapor Deposition (PVD), Magnetron Sputtering; Silicon-carbon; Thin film.
© 2024 The Authors.