SnO2/Au Microelectromechanical Systems Modified by Oxygen Vacancies for Enhanced Sensing of Dioctyl Phthalate

Xue Chen; Danyang Wang; Menghan Xu; Rongrong Jia; Dongqi Yu; Lei Huang

doi:10.1002/cplu.202400116

SnO2/Au Microelectromechanical Systems Modified by Oxygen Vacancies for Enhanced Sensing of Dioctyl Phthalate

Chempluschem. 2024 Apr 24:e202400116. doi: 10.1002/cplu.202400116. Online ahead of print.

Authors

Xue Chen¹, Danyang Wang¹, Menghan Xu¹, Rongrong Jia², Dongqi Yu¹, Lei Huang³

Affiliations

¹ Liaoning Normal University, School of Physics and Electronic Technology, CHINA.
² Shanghai University, Department of Physics, CHINA.
³ Shanghai University, Research Center of Nano Science and Technology, No. 99 Shangda Road, 200444, Shanghai, CHINA.

PMID: 38654700
DOI: 10.1002/cplu.202400116

Abstract

Dioctyl phthalate (DOP) serves as a characteristic gas utilized in early electrical fire detection, its detection offers promising prospects for the prevention of electrical fires. In this study, we employed a modified photodeposition method to prepare Tin dioxide (SnO2) materials co-modified with Au and oxygen vacancies. Subsequently, microelectromechanical systems (MEMS) gas sensor for DOP detection were fabricated, utilizing 0.5 %Au/SnO2-I as the sensing material. Characterization results reveal the presence of abundant oxygen vacancies in 0.5 %Au/SnO2-I. The synergistic interplay of Au and oxygen vacancies resulted in a remarkable response of 9.98 to 20 ppm of DOP at operational temperature of 250 °C. This represents a significant 96 % enhancement in comparison to the response value of 4.50 exhibited by pure SnO2 at 300 °C. Notably, this gas sensor boasts low power consumption and demonstrates a quick response in the detection of overheating polyvinyl chloride (PVC) cables under simulated conditions.

Keywords: MEMS, Gas sensor, SnO2, Dioctyl phthalate.