Formation dynamics of laser-induced periodic surface structures (LIPSSs) on the SiC substrates were described with varying pulse numbers and pulse duration. As the number of laser pulses increases, two significant transformations become evident in the progression of structural formations. First from surface roughening with nanoparticles to LIPSS with the period that is slightly shorter than the laser wavelength. Second it turns to LIPSS with a period less than half the laser wavelength. It is found that maintaining the crystallinity is the key to changing the structures. In the cases of longer pulse width than sub-nanoseconds, no LIPSS formations are observed or LSFL does not change to HSFL because the irradiated area is poly-crystallized.