Author Correction: 3D nanofabricated soft microrobots with super-compliant picoforce springs as onboard sensors and actuators

Affiliations

• ¹ Shenzhen Institute of Advanced Technology (SIAT), Chinese Academy of Sciences, Shenzhen, China. hf.xu@siat.ac.cn.
• ² Leibniz Institute for Solid State and Materials Research Dresden (Leibniz IFW Dresden), Dresden, Germany. hf.xu@siat.ac.cn.
• ³ Leibniz Institute for Solid State and Materials Research Dresden (Leibniz IFW Dresden), Dresden, Germany.
• ⁴ Shenzhen Institute of Advanced Technology (SIAT), Chinese Academy of Sciences, Shenzhen, China.
• ⁵ Shenzhen Institute of Artificial Intelligence and Robotics for Society, Shenzhen, China.
• ⁶ Shenzhen Bay Laboratory, Shenzhen, China.
• ⁷ Research Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, Chemnitz, Germany.
• ⁸ Leibniz Institute for Solid State and Materials Research Dresden (Leibniz IFW Dresden), Dresden, Germany. m.medina.sanchez@ifw-dresden.de.
• ⁹ Chair of Micro- and NanoSystems, Center for Molecular Bioengineering (B CUBE), Dresden University of Technology, Dresden, Germany. m.medina.sanchez@ifw-dresden.de.
• ¹⁰ Research Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, Chemnitz, Germany. oliver.schmidt@main.tu-chemnitz.de.