In vivo 3D ultrasound imaging with 2D-array transducers is of great importance for both clinical application and biomedical research, but it is complicated in fabrication and also very expensive in hardware due to thousands of electronic channels. In this work, we demonstrate a new fabrication process of 7-MHz 128 + 128 elements row-column-array (RCA) transducer with relaxor ferroelectric PMN-0.28PT single crystal. With piezoelectric single crystal and improved acoustic matching, the optimized performance of -6 dB bandwidth of ∼82 % and insertion loss of -44.6 dB is achieved. The axial and lateral imaging resolutions at different depth of the RCA transducer are quantified by the point spread function (PSF), and the results are respectively 0.20 mm and 0.41 mm at the depth of 7.7 mm, and 0.22 mm and 0.47 mm at the depth of 16.7 mm. The transducer is validated experimentally on a hyperechoic phantom, and 3D view and slices of B-mode images are obtained. The experimental results indicate that our developed RCA transducer can obtain high-quality 3D ultrasound images, demonstrating great potential on ultrafast 3D and functional imaging.
Keywords: Biomedical imaging; Biomedical transducers; Ferroelectric devices; Ultrasonic transducer arrays.
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