Elastomeric polymers have gained significant attention in the field of flexible electronics. The investigation of the electro-mechanical response relationship between polymer structure and flexible electronics is in increasing demand. This study investigated the factors that affect the performance of flexible capacitive pressure sensors using the finite element method (FEM). The sensor employed a porous elastomeric polymer as the dielectric layer. The results indicate that the sensor's performance was influenced by both the structural and material characteristics of the porous elastomeric polymer. In terms of structural characteristics, porosity was the primary factor influencing the performance of sensors. At a porosity of 76%, the sensitivity was 42 times higher than at a porosity of 1%. In terms of material properties, Young's modulus played a crucial role in influencing the performance of the sensors. In particular, the influence on the sensor became more pronounced when Young's modulus was less than 1 MPa. Furthermore, porous polydimethylsiloxane (PDMS) with porosities of 34%, 47%, 67%, and 72% was fabricated as the dielectric layer for the sensor using the thermal expansion microsphere method, followed by sensing capability testing. The results indicate that the sensor's sensitivity was noticeably influenced within the high porosity range, aligning with the trend observed in the simulation.
Keywords: capacitive flexible sensor; electro-mechanical coupling; finite element method; porous elastomeric polymer.