In this study, we developed a novel wireless, passive pressure-sensing method functional at cryogenic temperatures (-196 °C). The currently used pressure sensors are inconvenient and complicated in cryogenic environments for their weak low-temperature tolerances and long wires for power supply and data transmission. We propose a novel pressure-sensing method for cryogenic applications by only using low-temperature-tolerant passive devices. By innovatively integrating a magnetoresistor (MR) on a backscattering antenna, the pressure inside a cryogenic environment is transferred to a wirelessly obtainable return loss. Wireless passive measurement is thus achieved using a backscattering method. In the measurement, the pressure causes a relative displacement between the MR and a magnet. The MR's resistance changes with the varied magnetic field, thus modulating the antenna's return loss. The experimental results indicate that our fabricated sensor successfully identified different pressures, with high sensitivities of 4.3 dB/MPa at room temperature (24 °C) and 1.3 dB/MPa at cryogenic temperature (-196 °C). Additionally, our method allows for simultaneous wireless readings of multi sensors via a single reading device by separating the frequency band of each sensor. Our method performs low-cost, simple, robust, passive, and wireless pressure measurement at -196 °C; thus, it is desirable for cryogenic applications.
Keywords: backscattering; cryogenic; magnetoresistor; passive; pressure sensing; wireless.