Crafting chirality in three dimensions via a novel fabrication technique for bound states in the continuum metasurfaces

Zaid Haddadin; Anna My Nguyen; Lisa V Poulikakos

doi:10.1038/s41377-023-01368-z

Crafting chirality in three dimensions via a novel fabrication technique for bound states in the continuum metasurfaces

Light Sci Appl. 2024 Feb 5;13(1):45. doi: 10.1038/s41377-023-01368-z.

Authors

Zaid Haddadin¹, Anna My Nguyen², Lisa V Poulikakos^{3

4}

Affiliations

¹ Department of Electrical & Computer Engineering, University of California San Diego, La Jolla, CA, USA.
² Department of Mechanical & Aerospace Engineering, University of California San Diego, La Jolla, CA, USA.
³ Department of Mechanical & Aerospace Engineering, University of California San Diego, La Jolla, CA, USA. lpoulikakos@ucsd.edu.
⁴ Program of Materials Science & Engineering, University of California San Diego, La Jolla, CA, USA. lpoulikakos@ucsd.edu.

Abstract

An additional deposition step was added to a multi-step electron beam lithographic fabrication process to unlock the height dimension as an accessible parameter for resonators comprising unit cells of quasi-bound states in the continuum metasurfaces, which is essential for the geometric design of intrinsically chiral structures.