Accurate pose measurement is crucial for parallel manipulators (PM). This study designs a novel integrated 6-DOF motion tracking system to achieve precise online pose measurement. However, the presence of geometric errors introduces imperfections in the accuracy of the measured pose. Based on the displacement information of six grating rulers, measurement pose is obtained through forward kinematics. By comparing the measurement results with the actual pose information captured by stereo vision, measurement errors can be obtained. A closed-loop vector-based kinematic model and an error model are established, and then the geometric errors are identified with the least-squares method. Finally, the geometric calibration experiments are conducted, and the results show that the measurement accuracy has significantly improved, with the average position error decreasing from 3.148 mm to 0.036 mm, and the average orientation error is decreased from 0.225° to 0.022°.