Design, analysis, and testing of a new asymmetric vibration-assisted stage for roll-type polishing

Yan Gu; Zisu Xu; Jieqiong Lin; Silin Liu; Xingwang Xu; Hongyu Chen; Bin Fu; Yuan Xi

doi:10.1063/5.0157230

Design, analysis, and testing of a new asymmetric vibration-assisted stage for roll-type polishing

Rev Sci Instrum. 2023 Dec 1;94(12):125011. doi: 10.1063/5.0157230.

Authors

Yan Gu^{1

2}, Zisu Xu^{1

2}, Jieqiong Lin^{1

2}, Silin Liu^{1

2}, Xingwang Xu^{1

2}, Hongyu Chen^{1

2}, Bin Fu^{1

2}, Yuan Xi^{1

2}

Affiliations

¹ Jilin Provincial Key Laboratory of Micro-Nano and Ultra-Precision Manufacturing, School of Mechatronic Engineering, Changchun University of Technology, Yan'an Ave. 2055, Changchun, Jilin 130012, People's Republic of China.
² Jilin Provincial Key Laboratory of International Science and Technology Cooperation for High Performance Manufacturing and Testing, School of Mechatronic Engineering, Changchun University of Technology, Yan'an Ave. 2055, Changchun, Jilin 130012, People's Republic of China.

PMID: 38133941
DOI: 10.1063/5.0157230

Abstract

Based on the technological characteristics of roll-type polishing, a new asymmetric vibration-assisted stage is proposed in this paper. This stage is characterized by asymmetric displacement and asymmetric stiffness. With the average particle spacing of roll-type polishing as the constraint, the comprehensive characteristics of structural stiffness, kinematic range, and natural frequency are realized. Thus, to reduce the surface roughness, the removal of simple-directional surface textures generated by roll-type polishing can be achieved. First, the asymmetric structure is designed, modeled, and optimized according to working performance design goals of roll-type polishing. Then, the finite element analysis and actual performance test of the stage are carried out to verify the accuracy of the established model and the effectiveness of the optimization design. The results indicate that the stage can meet the design index. Finally, the asymmetric vibration-assisted polishing experiment is carried out. The results show that the single-directional surface textures of the SiC surface are interrupted and the surface roughness is decreased.