Capacitive pressure sensors capable of replicating human tactile senses have garnered tremendous attention. Introducing microstructures into the dielectric layer is an effective approach to improve the sensitivity of the sensors. However, most reported processes to fabricate microstructured dielectric layers are complicated and time-consuming and usually have adverse effects on the mechanical properties. Herein, we report a mechanically strong and highly stretchable dielectric layer fabricated from a microstructured fluorinated elastomer with a high dielectric constant (5.8 at 1000 Hz) via a simple and low-cost thermal decomposition process. Capacitive pressure sensors based on this microstructured fluorinated elastomer dielectric layer and soft ionotronic electrodes illustrate an impressing stretchability (>300%), a high pressure sensitivity (17 MPa-1), a wide detection range (70 Pa-800 kPa), and a fast response time (below 300 ms). Moreover, the multipixel capacitive pressure sensors sensing array maintains the unique spatial tactile sensing performance even under significant tensile deformation. It is believed that our microstructured fluorinated elastomer dielectric layer might find wide applications in stretchable ionotronic devices.
Keywords: capacitive sensors; health monitoring; high dielectric constant; spatial tactile sensing; stretchable pressure sensors.