Spatial mapping of photovoltage and light-induced displacement of on-chip coupled piezo/photodiodes by Kelvin probe force microscopy under modulated illumination

Zeinab Eftekhari; Nasim Rezaei; Hidde Stokkel; Jian-Yao Zheng; Andrea Cerreta; Ilka Hermes; Minh Nguyen; Guus Rijnders; Rebecca Saive

doi:10.3762/bjnano.14.87

Spatial mapping of photovoltage and light-induced displacement of on-chip coupled piezo/photodiodes by Kelvin probe force microscopy under modulated illumination

Beilstein J Nanotechnol. 2023 Nov 6:14:1059-1067. doi: 10.3762/bjnano.14.87. eCollection 2023.

Authors

Zeinab Eftekhari¹, Nasim Rezaei¹, Hidde Stokkel¹, Jian-Yao Zheng¹, Andrea Cerreta², Ilka Hermes², Minh Nguyen¹, Guus Rijnders¹, Rebecca Saive¹

Affiliations

¹ Inorganic Materials Science, MESA+, University of Twente, Enschede, 7522NB, the Netherlands.
² Park Systems Europe GmbH, 68199 Mannheim, Germany.

Abstract

In this work, a silicon photodiode integrated with a piezoelectric membrane is studied by Kelvin probe force microscopy (KPFM) under modulated illumination. Time-dependent KPFM enables simultaneous quantification of the surface photovoltage generated by the photodiode as well as the resulting mechanical oscillation of the piezoelectric membrane with vertical atomic resolution in real-time. This technique offers the opportunity to measure concurrently the optoelectronic and mechanical response of the device at the nanoscale. Furthermore, time-dependent atomic force microscopy (AFM) was employed to spatially map voltage-induced oscillation of various sizes of piezoelectric membranes without the photodiode to investigate their position- and size-dependent displacement.

Keywords: Kelvin probe force microscopy (KPFM); light-driven micro/nano systems; piezoelectric membrane; surface photovoltage (SPV); time-dependent AFM.

Grants and funding

This publication is part of the project Piezo-photomotion: light-driven nano piezo-propulsion and agitation with project number VI.Vidi.193.020 of the research programs Vidi and Aspasia, which is financed by the Dutch Research Council (NWO).