In-situ TEM study from the perspective of holders

Toshie Yaguchi; Mia L San Gabriel; Ayako Hashimoto; Jane Y Howe

doi:10.1093/jmicro/dfad055

In-situ TEM study from the perspective of holders

Microscopy (Oxf). 2024 Apr 8;73(2):117-132. doi: 10.1093/jmicro/dfad055.

Authors

Toshie Yaguchi¹, Mia L San Gabriel², Ayako Hashimoto^{3

4}, Jane Y Howe^{2

5}

Affiliations

¹ Electron Microscope Systems Design Department, Hitachi High-Tech Corporation, 552-53 Shinko-cho, Hitachinaka-shi, Ibaraki-ken 312-8504, Japan.
² Department of Materials Science and Engineering, University of Toronto, 184 College St, Toronto, ON M5S 3E4, Canada.
³ In-situ Electron Microscopy Technique Development Group, National Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, Japan.
⁴ Degree Programs in Pure and Applied Sciences, University of Tsukuba, 1-2-1 Sengen, Tsukuba 305-0047, Japan.
⁵ Department of Chemical Engineering and Applied Chemistry, University of Toronto, 200 College St, Toronto, ON M5S 3H6, Canada.

PMID: 37986584
DOI: 10.1093/jmicro/dfad055

Abstract

During the in situ transmission electron microscopy (TEM) observations, the diverse functionalities of different specimen holders play a crucial role. We hereby provide a comprehensive overview of the main types of holders, associated technologies and case studies pertaining to the widely employed heating and gas heating methods, from their initial developments to the latest advancement. In addition to the conventional approaches, we also discuss the emergence of holders that incorporate a micro-electro-mechanical system (MEMS) chip for in situ observations. The MEMS technology offers a multitude of functions within a single chip, thereby enhancing the capabilities and versatility of the holders. MEMS chips have been utilized in environmental-cell designs, enabling customized fabrication of diverse shapes. This innovation has facilitated their application in conducting in situ observations within gas and liquid environments, particularly in the investigation of catalytic and battery reactions. We summarize recent noteworthy studies conducted using in situ liquid TEM. These studies highlight significant advancements and provide valuable insights into the utilization of MEMS chips in environmental-cells, as well as the expanding capabilities of in situ liquid TEM in various research domains.

Keywords: in situ transmission electron microscopy; ETEM; MEM; closed (sealed) gas cell; differential pumping; environmental cell.