In Ar-based inductively coupled plasma mass spectrometry (MS), Ar-related interference and the low ionization capacity of the Ar-ion source prevent facile and precise determination of certain elements. To address this problem, we investigated the application of microwave-induced plasma (MIP), and we improved its ionization capacity using He as the working gas. The MIP ion source was connected to a multicollector mass spectrometry (MC-MS) apparatus to improve the accuracy and precision of the isotopic analysis. A vacuum pump was used to achieve a low pressure (200-300 Pa) at the interface. The analytical figures of merit were discussed and evaluated by measuring the oxygen isotopes in oxygen. With the application of low-pressure He-MC-MIP-MS, the degree of ionization of oxygen could be significantly improved with He plasma. The interference of oxygen from the atmosphere could also be eliminated with low-pressure plasma, and the determination precision of oxygen isotopes could be improved with the application of MC-MS. Subsequently, using this method, 16O18O/16O16O was applied as the analytical ratio to investigate the interference, sensitivity, and precision. With this constructed method, the obtained long-term producibility of δ18O was 0.16‰ (2 SD), and the measured result for oxygen was consistent with that obtained by MAT 253 within the uncertainty limit. The development of low-pressure He-MC-MIP-MS can pave the way for the accurate measurement of nonmetal isotopes and easily interfered isotopes in Ar plasma.