Due to the huge demand for higher resolution and stable imaging from fluorescent labeling biological systems and life systems, there has been much research and development of structured light illumination imaging (SIM). Despite this, further investigating the possible applications of SIM in other fields is still meaningful. In this paper, super-resolution observation of non-fluorescent samples by a SIM system under reflective illumination is analyzed. The simulation of SIM imaging and image reconstruction is carried out by using an open-source program, and the influences of the structural parameters of the illumination light (fringe direction, phase, and intensity uniformity of the cosine structured light), the optical parameters of the imaging system (selection of the optical transfer function) and the anti-vibration characteristics of the platform on the super-resolution imaging effect are studied. Finally, by optimizing the above influential factors according to simulation results, successful application of SIM in laser processing process monitoring is demonstrated in the experiment. We believe that our research results will provide some reference for the application of SIM in other similar scenarios.