The thermochemistry of the Si-O-H system has been extensively studied both experimentally and theoretically due to its importance in chemical processes, degradation of silica-protected materials in combustion, and geological processes. In this paper, we review past studies and use quantum mechanical methods to generate a new data set. Molecular geometries were generated with DFT using the B3LYP functional. Energetics were calculated with RCCSD(T) methods extrapolated to the complete basis set (CBS/45) limit. Particular attention was given to the treatment of the vibrational modes. A rigid rotor model was used, corrections for anharmonicity were applied, and the Pitzer-Gwinn treatment of the hindered rotation of the M-OH groups was applied. The generated enthalpies of formation at 298 K are compared to those of experiments and other calculations. Generally, the agreement is good. A set of thermodynamic data (enthalpy of formation at 298 K, entropy at 298 K, and heat capacity polynomial to 3000 K) is presented for SiOH, SiO(OH), Si(OH)2, SiO(OH)2, Si(OH)3, Si(OH)4, Si2O(OH)6, and Si3O2(OH)8. These can be added to any of the common computational thermodynamics packages. The application of these data to high-temperature corrosion and geological problems is discussed.