The low performance of sensors based on an all-dielectric metasurface limits their application compared to metallic counterparts. Here, for the first time, an all-dielectric BIC (bound states in the continuum) metasurface is employed for highly sensitive phase interrogation refractive index sensing. The proposed sensor is well analyzed, fabricated, and characterized. Experimentally, a high-performance BIC-based microfluidic sensing chip with a Q factor of 1200 is achieved by introducing symmetry breaking. A refractive index sensor with high figure of merit of 418 RIU-1 is demonstrated, which is beneficial to the phase interrogation. Notably, we measure a record phase interrogation sensitivity of 2.7 × 104 deg/RIU to the refractive index, thus enabling the all-dielectric BIC to rival the refractive index detection capabilities of metal-based sensors such as surface plasmon resonance. This scheme establishes a pivotal role of the all-dielectric metasurface in the field of ultrahigh sensitivity sensors and opens possibilities for trace detection in biochemical analysis and environment monitoring.
Keywords: all dielectric metasurface; bound states in the continuum; high sensitivity; phase interrogation; refractive index; sensors.