MC design and FIB preparation of a YSZ biochemical material microstructure

Xintian Wang; Hao Cui; Zhaoqiang Chen; Li Wang; Jun Chen; Mingdong Yi; Guangchun Xiao; Jingjie Zhang; Hui Chen; Chonghai Xu

doi:10.1016/j.jmbbm.2023.106152

MC design and FIB preparation of a YSZ biochemical material microstructure

J Mech Behav Biomed Mater. 2023 Nov:147:106152. doi: 10.1016/j.jmbbm.2023.106152. Epub 2023 Sep 26.

Authors

Xintian Wang¹, Hao Cui¹, Zhaoqiang Chen², Li Wang³, Jun Chen³, Mingdong Yi³, Guangchun Xiao⁴, Jingjie Zhang³, Hui Chen³, Chonghai Xu⁴

Affiliations

¹ School of Mechanical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250353, China.
² School of Mechanical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250353, China; Shandong Machinery Design and Research Institute, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250031, China; Key Laboratory of Advanced Manufacturing and Measurement and Control, Technology for Light Industry in Universities of Shandong, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250353, China. Electronic address: czq@qlu.edu.cn.
³ School of Mechanical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250353, China; Key Laboratory of Advanced Manufacturing and Measurement and Control, Technology for Light Industry in Universities of Shandong, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250353, China.
⁴ School of Mechanical Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250353, China; Shandong Machinery Design and Research Institute, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250031, China; Key Laboratory of Advanced Manufacturing and Measurement and Control, Technology for Light Industry in Universities of Shandong, Qilu University of Technology (Shandong Academy of Sciences), Jinan, 250353, China.

PMID: 37776762
DOI: 10.1016/j.jmbbm.2023.106152

Abstract

Aiming at the difficulty of traditional machining of Y₂O₃-ZrO₂ (YSZ) inert ceramic materials, a different method using focused ion beam to selectively create nanoscale microscale structures on the surface of materials was proposed. The sputtering yield, surface damage, and the energy loss of YSZ materials was investigated using the SRIM software using the Monte Carlo method. It is shown that the sputtering yield increases with ion energy in the range 0-30 keV, reaching a maximum of 9.4 atoms/ion at 30 keV. At an ion beam voltage of 30 keV, the most severe damage to the material is 8 mm on the surface. At the same time, the main forms of energy loss in the treatment are phonon energy loss and ionization energy loss, of which phonon energy loss due to the recoil atoms is the largest. In addition, we continue to perform focused ion beam processing experiments on YSZ materials, combining previous MC modeling to optimize different operating conditions such as ion beam, voltage and processing mode. The optimized processing parameters are 30 keV and 2.5 nA. It is shown that the quality of the deep grooves gradually improves with decreasing ion beam current at the same ion beam voltage. However, an excessively small ion beam current leads to an excessively large depth of the deep grooves and lengthy processing times.

Keywords: FIB processing; Monte Carlo; Property; YSZ microstructure.